Materials for Quantum Devices

In the field of materials for quantum devices, we are interested in atomic structure / decoherence relationships and how to use this information to improve processing techniques for longer coherence lifetimes and stable operation frequencies. We are applying ASAT to quantum devices to count point defects at interfaces and also using surface passivation to improve coherence lifetimes at the solid / vacuum interfaces. Below are some examples of projects we are currently working on. Applying ASAT to semiconductor, Josephson Junction, and H-depassivation lithography are sponsored by LPS.

ASAT of Planar Semiconductor Devices

Ge quantum wells grown by MBE


Gorman, B., Holtz, M., Richardson, C., Gaspe, C., Supple, E., & Butera, R. (2021). 4-D STEM Analyses of Cylindrical Specimens for Atom Probe Tomography. Microscopy and Microanalysis, 27(S1), 184-186. doi:10.1017/S1431927621001276




ASAT of Josephson Junctions

Al / AlOx / Al

Epitaxial NbTiN / AlN / NbTiN


Supple, E., Holtz, M., Richardson, C., & Gorman, B. (2021). Atomic Structure of Superconducting Tunnel Junctions using STEM and APT. Microscopy and Microanalysis, 27(S1), 2460-2462. doi:10.1017/S1431927621008795



ASAT of H-Depassivation Lithography Defined Single Atom Qubits and Delta Layers

Si: B

Si: P

Si: Al

Surface Passivation for Increased Coherence Lifetimes

Josephson Junctions

Point Defects and Their Contributions to Decoherence


UHV Electron Microscopy of Devices operating at 4K